Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical systems

In this paper, the nonlinear squeeze-film damping (SFD) involving rarefied gas effect in micro-electro-mechanical systems (MEMS) is investigated. Considering motion of structures (beam, cantilever, and membrane) MEMS, dynamic response structure affected greatly by SFD. traditional model, a viscous assumption that force linear with moving velocity used. As phenomenon observed for micro-structure oscillating at high velocity, does not hold will cause error results predicting micro-structure. Meanwhile, due to small size device low pressure encapsulation, MEMS usually gas. Therefore, correctly predict force, must be considered. To study SFD problem effect, kinetic method, i.e., discrete unified scheme (DUGKS), introduced paper. Also, based on DUGKS, two solving methods, decoupled method (Eulerian scheme) coupled framework (arbitrary Lagrangian-Eulerian scheme), are adopted. With these basic forms, (perpendicular) tilting motions rigid micro-beam, studied under forced free oscillations. For oscillation, resonance regime, some numerical different maximum velocities presented discussed. Besides, influence oscillation frequency or torque also studied,